Vacuums

Compact Hard PVD Functionnal Coating S1000

Compact Hard PVD Functionnal Coating S1000
  • Compact system (H2200 x W1650 x L3900)
     
  • Utilities in a single part of the unit
     
  • Extremely short utility commissioning
     
  • Fast to install


Performances
Specifications
- High productivity, fast cycle time - Internal chamber size (mm): 1000 x 1250
- Easy to use, easy to service and maintain - Usable plasma volume (mm): D700 x H700
- Up to 1-4 materials for coating design - Bias power supply: DC pulsed 20 kW
- High performance coating - Arc power supply: 400 A pulsed
- Glow discharge etching and metal ion etching - Shank tools capacity Ø6 x 50 mm: 3000 pcs/batch
- Recipes: TiN, CrN, TiCN, AlTiN, AlCrN, AlTiSiN, ... - Hobs tools capacity Ø80 x 180 mm: 48 pcs/batch

- Cycle time for 2 µm AlTiN: 4h