Vacuums

Active Ion Gauge

Active Ion Gauge
  • Full 8-decade measurement capability, to 6.6x10⁻¹⁰mbar
     
  • Two versions available
    each with three vacuum coupling variants: ‘D’ versions have a 9-pin ‘D’ connector and standard interface;
  • Up to a thirty-fold reduction in charged particle process contamination compared to leading competitors.
     
  • Automatic filament protection against switching on at atmosphere and running or degassing at high pressure.

The Active Ion Gauge (AIGX) is a compact active ion gauge with dual yttria coated iridium filaments, a wide measuring range from 6.6x10⁻² to 6.6x10⁻¹⁰ mbar and a 1 Volt/decade linear output.

The AIGX incorporates all benefits of the industry standard active gauging concept, with integral electronics and replaceable tube. The gauge has a degas facility and includes features to protect and extend the life of the filaments.

The AIGX benefits from extremely low emissions of charged particles, which makes it an excellent choice for processes where background noise is undesirable.

Technical Data





AIGX-S
Pressure range
mbar 6.6 x 10-2 to 6.6 x to 10-10
Accuracy
mbar Typically +/- 15%
Max overpressure
bar 10 bar absolute (145 psi)
Temperature range Operating
°C 0 to +40
Temperature range Storage
°C -30 to +70