iXL Dry Pump

iXL Dry Pump
  • 110 / 930 m³/h
    Hermetically Sealed, innovative mechanism
  • 0.013 / 0.001 mbar
    Superior vacuum levels achieved
  • Plug and Pump
    Integral controller and safety systems for flexible operation
  • <55 dB(A)
    Smooth, low noise and vibration operation
  • No routine maintenance
    Oil lubricated precision bearings with no routine maintenance

iXL is the most compact and low energy dry pump option. It provides repeatable fast pump down of small load lock chambers and clean process operations, with extremely low power consumption.

iXL Sizes

Peak Pumping Speed
110 930
Ultimate Pressure
mbar 0.013 0.001
Power at Ultimate
kW 0.55 1
Power in Green Mode
kW 0.045 0.05
Noise at Ultimate
dB(A) < 55 < 55