iXL Dry Pump
- 110 / 930 m³/h
Hermetically Sealed, innovative mechanism - 0.013 / 0.001 mbar
Superior vacuum levels achieved - Plug and Pump
Integral controller and safety systems for flexible operation - <55 dB(A)
Smooth, low noise and vibration operation - No routine maintenance
Oil lubricated precision bearings with no routine maintenance
iXL is the most compact and low energy dry pump option. It provides repeatable fast pump down of small load lock chambers and clean process operations, with extremely low power consumption.
iXL Sizes
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iXL120N
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iXL1000N
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| Peak Pumping Speed
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m³/h
|
110 | 930 |
| Ultimate Pressure
|
mbar | 0.013 | 0.001 |
| Power at Ultimate
|
kW | 0.55 | 1 |
| Power in Green Mode
|
kW | 0.045 | 0.05 |
| Noise at Ultimate
|
dB(A) | < 55 | < 55 |