Vacuums

Manual Gate Valves

Manual Gate Valves
  • Able to withstand 1.2 bar absolute in either direction
    Avoids re-start issues by keeping the pump running during maintenance
  • Stainless steel construction and robust design
    Long service life and reliability in harsh environments.
  • Pneumatic solenoid and pre-wired option
  • Simple grease-free sealing mechanism
    Minimises damage due to particulates in dusty processes.
  • Pre‑configured simple ‘plug and play’ installation.

Edwards BGV gate valves are bellows sealed stainless steel gate valves for use in applications which require high leak tightness and a minimum of hydrocarbons in the vacuum system. Although principally designed for the isolation of pumps in the semiconductor fab basement, BGV gate valves are also ideal in other applications where a 1 bar differential at opening is desirable.

They are designed for use in the pressure range of 1.2 bar absolute to 1 x 10-8 mbar (1.2 x 105 to 1x10‑6 Pa). BGV gate valves will withstand 1.2 bar absolute in either direction allowing the vacuum line above the pump to be vented with the valve closed. The BGV manual valves have a visual indication of the gate position on the side of the assembly to show when it is open.

Technical Data





BGV
Leak rate (body / Valve seat)
mbar l/s <1x10-9 / <1x10-7
Pressure range

1x10-8mbar to 1.2 bar
Max Operating temperature (valve body)
°C 150
Cycles until first service

5000
Available with

NW50, ISO63, ISO80, ISO100, ISO160